ELEN E4944x Principles of Device Microfabrication Lect: 3. 3 pts.Not offered in 2009-2010. Science and technology of conventional and advanced microfabrication techniques for electronics, integrated and discrete components. Topics include diffusion; ion implantation, thin-film growth including oxides and metals, molecular beam and liquid-phase epitaxy; optical and advanced lithography; and plasma and wet etching.