ELEN E6945x or y Device nanofabrication Lect: 3. 3pts. Prerequisites: ELEN E3106 and E3401, or the equivalents. Recommended: ELEN E4944. This course provides an understanding of the methods used for structuring matter on the nanometer length: thin-film technology; lithographic patterning and technologies including photon, electron, ion and atom, scanning probe, soft lithography, and nanoimprinting; pattern transfer; self-assembly; process integration; and applications.